Engineering Transportation

Ceramic Thick Films for MEMS and Microdevices by Robert A. Dorey

By Robert A. Dorey

Content material:
Front Matter

, Pages ii-iii

, Page iv

, Page xiii

, Page xv

, Pages xvii-xviii
Chapter 1 - Integration and units: What kind of buildings are required for thick-film units, why is it tough to lead them to, and the way can the demanding situations be overcome?

, Pages 1-33
Chapter 2 - Routes to thick motion pictures: what's a thick movie? How is it made?

, Pages 35-61
Chapter three - Thick-film deposition innovations: the right way to make thick movies – the processing strategies used to create films

, Pages 63-83
Chapter four - Microstructure–property relationships: How the microstructure of the movie impacts its properties

, Pages 85-112
Chapter five - Patterning: how one can move from a coating to a shape

, Pages 113-143
Chapter 6 - Houston, now we have an issue: the best way to repair it whilst all of it is going wrong

, Pages 145-166
Chapter 7 - Recipes: Let’s get cooking!

, Pages 167-181

, Pages 183-185

, Pages 187-191

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Example text

Metal alkoxides are relatively larger molecules consisting of a metal ion surrounded by a number of organic alkoxide groups. During sol synthesis, the metal-organic precursors undergo hydrolysis and condensation reactions to build up the 3D nanoscale metal-organic clusters. During hydrolysis reactions, the metal alkoxides become partially hydrolyzed by reacting with water to replace one or more of the alkoxide side groups. Condensation reaction can then take place, leading to the polymerization of these partially hydrolyzed metal alkoxides and the release of water and alcohol.

Higher levels of energy can be captured by making use of the bending motion induced by thermal expansion mismatches between the pyroelectric material and the substrate. While driven by a changing temperature, power is generated via the piezoelectric effect. 4 Other functional devices There are a host of other functional ceramics that can be incorporated into microsystems in a similar way to piezoelectric materials. The structures adopted are often based on the same basic structure with electrical connections to the functional ceramic, in order to transmit the resultant signal or power, which is placed on a supporting substrate.

Not only does the sintering aid increase the rate of diffusion, it also acts as a lubricant which, in the very early stages of sintering, allows the powder particles to rearrange themselves into more favorable packing structure. This increases grain-on-grain contact and can also increase the green density of the ceramic, meaning that the total amount densification required on sintering is reduced. 1 provides some examples of liquid-phase sintering aids and the typical quantities added. 3 Thick-film powder-based routes 45 Relatively high levels of sintering aids can be used, as in the case of lead borosilicate glass where up to 30 vol% is added to bind the active ceramic particles together and to the substrate.

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